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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX5999D/D
0 to 1000 kPa (0 to 150 PSI) On-Chip Signal Conditioned, 0.2 V to 4.7 V Output, Temperature Compensated and Calibrated, Silicon Pressure Sensor
The MPX5999D piezoresistive transducer is a state-of-the-art pressure sensor designed for a wide range of applications, but particularly for those employing a microcontroller or microprocessor with A/D inputs. This patented, single element X-ducer combines advanced micromachining techniques, thin-film metallization and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on the stand-alone sensing chip. Features * Temperature Compensated Over 0 to 85C * Ideally Suited for Microprocessor or Microcontroller-Based Systems * Patented Silicon Shear Stress Strain Gauge * Durable Epoxy Unibody Element
MPX5999D
X-ducerTM SILICON PRESSURE SENSORS
BASIC CHIP CARRIER ELEMENT CASE 867-08, STYLE 1
PIN NUMBER
VS 3
1 2 3
Vout Gnd VS
4 5 6
N/C N/C N/C
X-ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND
GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY
1
Vout
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead.
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA Value 4000 6000 - 40 to +150 - 40 to +125 Unit kPa kPa C C
1. TC = 25C unless otherwise noted. Maximum Ratings apply to Case 867-08 only. 2. Extended exposure at the specified limits may cause permanent damage or degradation to the device. 3. This sensor is designed for applications where P1 is always greater than, or equal to P2. Senseon and X-ducer are trademarks of Motorola, Inc.
(Replaces MPX5999)
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPX5999D
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Zero Pressure Offset(3) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS V/P (0 to 85C) -- tR IO+ -- Min 0 4.75 -- 0.088 4.587 -- -- -- -- -- -- Typ -- 5.0 7.0 0.2 4.7 4.5 4.5 -- 1.0 0.1 20 Max 1000 5.25 10 0.313 4.813 -- -- 2.5 -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc mV/kPa %VFSS ms mA Sec
Full Scale Output(4) (0 to 85C) Full Scale Span(5) (0 to 85C) Sensitivity Accuracy(6) Response Time(7) Output Source Current at Full Scale Output Warm-Up(8)
MECHANICAL CHARACTERISTICS
Characteristic Weight, Basic Element (Case 867) Cavity Volume Volumetric Displacement Symbol -- -- -- Min -- -- -- Typ 4.0 -- -- Max -- 0.01 0.001 Unit Grams IN3 IN3
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized. 9. P2 max is 500 kPa.
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Motorola Sensor Device Data
MPX5999D
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum and maximum output curves are shown for operation over 0C to 85C. (Device output may be nonlinear outside of the rated pressure range.) The performance over temperature is achieved by integrating the shear-stress strain gauge, temperature compensation, calibration and signal conditioning circuitry onto a single monolithic chip. Figure 3 illustrates the differential or gauge configuration in the basic chip carrier (Case 867). A fluoro silicone gel isolates the die surface and wire bonds from harsh environments, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX5999D pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows a typical decoupling circuit for interfacing the output of the MPX5999D to the A/D microprocessor. Proper decoupling of the power supply is recommended.
5.0 TRANSFER FUNCTION: 4.5 Vout = VS*(0.000901*P+0.04) ERROR 4.0 VS = 5.0 Vdc TEMP = 0 to 85C 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 0 100 200 300 400 500 600 700 800 DIFFERENTIAL PRESSURE (kPa) 900 1000 1100 MAX MIN TYPICAL
OUTPUT (V)
Figure 2. Output versus Pressure Differential
SILICONE DIE COAT DIE P1 WIRE BOND
STAINLESS STEEL METAL COVER
MPX5999D OUTPUT (PIN 1) 50 pF 51 k
A/D
LEAD FRAME
Motorola Sensor Device Data
EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE
P2 THERMOPLASTIC CASE
PROCESSOR
RTV DIE BOND
Figure 3. Cross-Sectional Diagram (Not to Scale)
Figure 4. Typical Decoupling Filter for Sensor to Microprocessor Interface
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MPX5999D
PRESSURE (P1) / VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below:
Pressure (P1) Side Identifier Stainless Steel Cap
Part Number MPX5999D
Case Type 867-08
ORDERING INFORMATION The MPX5999D pressure sensor is available as an element only.
MPX Series Device Type DiT Basic Element Differential Options Oi Case Type C T 867-08 Order Number MPX5999D Device Marking MPX5999D
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Motorola Sensor Device Data
MPX5999D
PACKAGE DIMENSIONS
C R M B -A- N
PIN 1 SEATING PLANE
1 2 3 4 5 6
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66
L
-T- G F D 6 PL 0.136 (0.005)
M
J S
TA
M
DIM A B C D F G J L M N R S
CASE 867-08 ISSUE N
BASIC ELEMENT (A, D)
STYLE 1: PIN 1. 2. 3. 4. 5. 6.
VOUT GROUND VCC V1 V2 VEX
Motorola Sensor Device Data
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MPX5999D
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315
MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps
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Motorola Sensor Device Data MPX5999D/D

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